2D100 The standard (2D100) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 100nm pitch etched into a silicon chip.
A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. Nanosensors™ will mediate a contract between the customer and PTB. Please ask for details.
Features:
- 100 nm pitch
- high accuracy
Detailed Specifications:
| Chip |
|
| Chip size: |
5x7 mm2 |
| Active area: |
100x100 µm2 |
The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area.
| Lattice |
|
| Pitch: |
100 nm |
| Accuracy of pyramid position: |
10 nm |
Accuracy of pitch
(10x10 µm2 scan): |
0.1% |
Accuracy of pitch
(100x100 µm2 scan): |
±0.01% |
|
| Pyramids |
|
| Edge length of square pyramids: |
approx. 50 nm |
Sidewall angle
(versus wafer surface): |
54.7º |
| Accuracy of sidewall angle: |
0.5 |
| Depth of pyramids: |
approx. 35 nm |
|
Order codes and shipping units:
| Order Code |
Quantity |
Data Sheet |
Calibration Certificate |
| 2D100 |
1 |
enclosed |
n/a |
| 2D100-CERT |
1 |
enclosed |
of PTB included |
Price:
| Order Code |
2D100 |
Price |
1270.00 GBP / 1380.00 EUR |
|
