Nanosurf and Nanosensors have developed an AFM with a novel self-sensing and self-actuating probe based on a quartz tuning fork.

This probe concept was invented at the Institute of Microtechnology (IMT) of the University of Neuchâtel, Switzerland, by Dr. Terunobu Akiyama, continuing a long-standing Swiss tradition of standing at the forefront of AFM technology.

The great advantage of this novel probe and its operation consists of combining the advantages of the tuning fork's extremely stable frequency with the silicon cantilever's softer spring constant. One immediate benefit lies in the gentler scan characteristics.



The AFM operates in dynamic mode scanning probe microscopy. The resonance frequency of the tuning fork, which is different from the eigenfrequency of the cantilever, is tracked by a phase locked loop (PLL) and kept at a set point by adjusting the vertical tip position with a feedback loop. Local material contrast properties can be imaged by measuring the amplitude controller's dissipation output signal.

Changing the probe is extremely easy. A magnetic probe mount allows for snapping the probe carrier onto the AFM head where it is self-centred by the three electrical ball contacts. No further mechanical adjustment is required, and because of the Akiyama-Probe's self-sensing nature, there is no need for laser adjustment either. This reduces downtime during measurement to an absolute minimum.

Particles on Si Wafer - Dissipation and Topography images

Changing the Akiyama-Probe with the Sensor Insertion Tool